Thermal & E-Beam Evaporation System

Application : Semiconductor, Display, LED, SAW Filter

Deposition of various materials(Metal, Organic & Inorganic)

Easy Maintenance / Simple Design & Compact Size / Excellent Throughput

Substrate : Wafer & Glass

System type : Cluster & Batch Type

- Substrate Type : Wafer & Glass

- Wafer Size : 2inch~6inch, Glass Size : ~200x200mm

- Process Application : Metal, Organic & Inorganic evaporation

- Thickness Uniformity : ≤ 3%

- Rate Stability : ≤ ±5%